Microsensors, MEMS and Smart Devices by Vijay K. Varadan
Wiley; 1 edition | December 15, 2001 | English | ISBN: 047186109X | 521 pages | PDF | 39 MB
Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle.
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