The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas. Chapters in part one review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.

Key Features: reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications; discusses wireless techniques and applications of wireless MEMS, including biomedical applications; describes monitoring structures and the environment with wireless MEMS.

Contents: Part 1 RF MEMS as an enabling technology for wireless applications: Overview of RF MEMS technology and applications; Overview of wireless techniques for use with MEMS; RF MEMS fabrication technologies; RF MEMS passive components for wireless applications; RF MEMS phase shifters for wireless applications; RF MEMS antennas for wireless applications; RF MEMS-based wireless architectures and front-ends; RF MEMS technology for next-generation wireless communications; Wafer-level packaging technology for RF MEMS; Reliability of RF MEMS. Part 2 Wireless techniques and applications of wireless MEMS: Energy harvesters for powering wireless systems; MEMS wireless implantable systems: Historical review and perspectives; Wireless considerations in ocular implants based on microsystems; MEMS-based wireless intraocular pressure sensors; Drug delivery using wireless MEMS; RF MEMS for automotive radar; Telecommunications reliability monitoring using wireless MEMS; Optical MEMS for displays in portable systems.

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