J. J. Cuomo, Stephen M. Rossnagel, Harold R. Kaufman - Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification and Synthesis
Published: 1990-01-14 | ISBN: 081551199X | PDF | 438 pages | 8 MB
This book deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.
Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.
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