Gertjan Koster, "In situ Characterization of Thin Film Growth"
English | ISBN: 1845699343 | 2012 | PDF | 296 pages | 10 MB
Recent advances in techniques to characterize thin films in-situ during deposition could lead to an improved understanding of deposition processes and to better, faster, diagnosis of issues with the deposition process. In-situ characterization of thin film growth will provide a comprehensive review of this increasingly important topic, focusing on the techniques and concepts.
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