Smart Material Systems and MEMS: Design and Development Methodologies by Vijay K. Varadan
Wiley; 1 edition | October 6, 2006 | English | ISBN: 0470093617 | 401 pages | PDF | 18 MB
Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail.
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