The building blocks of MEMS design through closed-form solutions
Microelectromechanical Systems, or MEMS, is the technology of very small systems;
it is found in everything from inkjet printers and cars to cell phones, digital
cameras, and medical equipment. This book describes the principles of MEMS via
a unified approach and closed-form solutions to micromechanical problems, which
have been recently developed by the author and go beyond what is available in
other texts. The closed-form solutions allow the reader to easily understand the
linear and nonlinear behaviors of MEMS and their design applications.

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