The building blocks of MEMS design through closed-form solutions
Microelectromechanical Systems, or MEMS, is the technology of
very small systems; it is found in everything from inkjet printers
and cars to cell phones, digital cameras, and medical equipment.
This book describes the principles of MEMS via a unified approach
and closed-form solutions to micromechanical problems, which have
been recently developed by the author and go beyond what is
available in other texts. The closed-form solutions allow the
reader to easily understand the linear and nonlinear behaviors
of MEMS and their design applications.
Beginning with an overview of MEMS, the opening chapter also
presents dimensional analysis that provides basic dimensionless
parameters existing in large- and small-scale worlds. The book
then explains microfabrication, which presents knowledge on the
common fabrication process to design realistic MEMS. From there,
coverage includes:
* Statics/force and moment acting on mechanical structures in
static equilibrium
* Static behaviors of structures consisting of mechanical elements
* Dynamic responses of the mechanical structures by the solving
of linear as well as nonlinear governing equations
* Fluid flow in MEMS and the evaluation of damping force acting
on the moving structures
* Basic equations of electromagnetics that govern the electrical
behavior of MEMS
* Combining the MEMS building blocks to form actuators and sensors
for a specific purpose
* All chapters from first to last use a unified approach in which
equations in previous chapters are used in the derivations of closed-
form solutions in later chapters.
This book is designed for senior or graduate students in electrical
and mechanical engineering, researchers in MEMS, and engineers from
industry. It is ideal for radio frequency/electronics/sensor
specialists who, for design purposes, would like to forego numerical
nonlinear mechanical simulations. The closed-form solution approach
will also appeal to device designers interested in performing large-
scale parametric analysis.
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