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MEMSMOEM Packaging (Nanoscience and Technology) PDF eBook €1 buy download

MEMS/MOEM Packaging (Nanoscience and Technology)
MgH | 2005 | ISBN: 0071455566 | 220 pages | PDF | 2,8 MB

While MEMS technology has progressed rapidly, commercialization of MEMS has been hindered by packaging technology barriers and costs. One of the key issues in the industrialization of MEMS, MOEM and ultimately Nanoelectrical devices is the development of appropriate packaging solutions for the protection, assembly, and long term reliable operation.