Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments By Alexey Ivanov
English | PDF | 2017 (2018 Edition) | 335 Pages | ISBN : 3658192372 | 10.18 MB
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

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